Design and optimization of differential capacitive micro accelerometer for vibration measurement

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types lags in sensitivity linearity. To overcome this problem, area-changed technique is adopted to improve even wide acceleration range (0–100 g). The linearity improved by designing U-folded suspension. movable mass designed many fingers connected parallel suspended over stationary electrodes. arrangement gives comb-type accelerometer. area changed using Intellisuite 8.6 Software. Design parameters such as spring width radius, length, proof are optimized Minitab 17 software. Mechanical 0.3506 ?m/g Electrical 4.706 ?F/g achieved. highest 7.899 ?m obtained cross-axis 0.47%.